- 专利标题: Heat assisted flip chip bonding apparatus
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申请号: US17533234申请日: 2021-11-23
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公开(公告)号: US11682650B2公开(公告)日: 2023-06-20
- 发明人: Wei-Hua Lu
- 申请人: National Pingtung University of Science and Technology
- 申请人地址: TW Pingtung County
- 专利权人: National Pingtung University of Science and Technology
- 当前专利权人: National Pingtung University of Science and Technology
- 当前专利权人地址: TW Pingtung County
- 代理机构: Jackson IPG PLLC
- 代理商 Demian K. Jackson
- 优先权: TW 0119900 2021.06.01
- 主分类号: B23K3/00
- IPC分类号: B23K3/00 ; B23K1/00 ; H01L23/00 ; B23K1/005 ; B23K3/08 ; B23K3/04 ; B23K101/40
摘要:
A heat assisted flip chip bonding apparatus includes a semiconductor assembly having a substrate and a chip, a heating source and a press and cover assembly having a cover element and press elements. The chip is disposed above the substrate and includes conductors which contact with conductive pads on the substrate. The heating source is provided to emit a heated light which illuminates the chip via an opening of the cover element. The press elements are located between the cover element and the semiconductor assembly and each includes an elastic unit and a pressing unit. Both ends of the elastic unit are connected to the cover element and the pressing unit respectively, and the pressing unit is provided to press a back surface of the chip.
公开/授权文献
- US20220384383A1 HEAT ASSISTED FLIP CHIP BONDING APPARATUS 公开/授权日:2022-12-01
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