Invention Grant
- Patent Title: Concentration measurement device
-
Application No.: US17288300Application Date: 2019-10-18
-
Publication No.: US11686671B2Publication Date: 2023-06-27
- Inventor: Masaaki Nagase , Hidekazu Ishii , Kouji Nishino , Nobukazu Ikeda
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JP 18201838 2018.10.26
- International Application: PCT/JP2019/041107 2019.10.18
- International Announcement: WO2020/085236A 2020.04.30
- Date entered country: 2021-04-23
- Main IPC: G01N21/31
- IPC: G01N21/31 ; G01N21/85 ; G01N33/00 ; H01L21/02

Abstract:
A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.
Public/Granted literature
- US20210396657A1 CONCENTRATION MEASUREMENT DEVICE Public/Granted day:2021-12-23
Information query
IPC分类: