Invention Grant
- Patent Title: Wafer map analyzer, method for analyzing wafer map using the same and method for manufacturing semiconductor device
-
Application No.: US15960701Application Date: 2018-04-24
-
Publication No.: US11688050B2Publication Date: 2023-06-27
- Inventor: Min Chul Park , Jeong Hoon Ko , Ji Yong Park , Je Hyun Lee , Dae Sin Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Volentine, Whitt & Francos, PLLC
- Priority: KR 20170102035 2017.08.11
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06V10/762 ; G06V10/764 ; H01L21/66 ; G06F18/23 ; G06F18/24 ; G06F18/2413

Abstract:
A method for analyzing a wafer map using a wafer map analyzer includes generating first wafer maps each displaying characteristics of a first wafer for a corresponding channel of a plurality of channels. The first wafer maps are auto-encoded together to extract a first feature. The method also includes determining whether the first feature is a valid pattern, classifying the type of the first feature based on unsupervised learning when the first feature is a valid pattern and extracting a representative image of features classified into the same type as the first feature.
Public/Granted literature
Information query