- Patent Title: Laser ablation apparatus and method of manufacturing display device
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Application No.: US16406250Application Date: 2019-05-08
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Publication No.: US11690278B2Publication Date: 2023-06-27
- Inventor: Joon Hyung Kim , Young Su Chae , Woo Hyun Kim , Seung Jun Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Innovation Counsel LLP
- Priority: KR 20180108470 2018.09.11
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01S3/16 ; H01S3/23 ; G02B27/10 ; H01L51/56 ; H01L27/32 ; B23K26/342

Abstract:
A laser ablation apparatus includes: a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser; an output beam generator for generating an output beam using the laser beams; and a substrate stage including at least one stage on which a carrier substrate formed on the front of a panel substrate is disposed. The output beam generator may include: mixers for generating mixed laser beams having two linear-polarizations orthogonal to each other by mixing the laser beams; and a photo molding machine for generating the output beam using the mixed laser beams.
Public/Granted literature
- US20200083449A1 LASER ABLATION APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE Public/Granted day:2020-03-12
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