- 专利标题: Rare earth regenerator material particle, rare earth regenerator material particle group, and cold head, superconducting magnet, examination apparatus, and cryopump using the same
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申请号: US17240687申请日: 2021-04-26
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公开(公告)号: US11692117B2公开(公告)日: 2023-07-04
- 发明人: Katsuhiko Yamada , Keiichi Fuse
- 申请人: KABUSHIKI KAISHA TOSHIBA , TOSHIBA MATERIALS CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA,TOSHIBA MATERIALS CO., LTD.
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA,TOSHIBA MATERIALS CO., LTD.
- 当前专利权人地址: JP Tokyo; JP Yokohama
- 代理机构: Foley & Lardner LLP
- 优先权: JP 12224522 2012.10.09
- 主分类号: C09K5/14
- IPC分类号: C09K5/14 ; C22C1/04 ; B22F9/08 ; C22C1/047 ; C09K5/08 ; F17C5/00 ; H01F6/04
摘要:
A rare earth regenerator material particle and a regenerator material particle group having a high long-term reliability, and a superconducting magnet, an examination apparatus, a cryopump and the like using the same are provided. A rare earth regenerator material particle contains a rare earth element as a constituent component, and in the particle, a peak indicating a carbon component is detected in a surface region by an X-ray photoelectron spectroscopy analysis.
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