Invention Grant
- Patent Title: Microfabricated electrochemical gas sensor
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Application No.: US17165521Application Date: 2021-02-02
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Publication No.: US11692963B2Publication Date: 2023-07-04
- Inventor: Yue Huang , Stanley Zuo
- Applicant: Yue Huang , Stanley Zuo
- Applicant Address: US MI East Lansing
- Assignee: Yue Huang,Stanley Zuo
- Current Assignee: Yue Huang,Stanley Zuo
- Current Assignee Address: US MI East Lansing
- Main IPC: G01N27/413
- IPC: G01N27/413 ; G01N27/404 ; G01N27/414 ; G01N27/416

Abstract:
A microfabricated electrochemical gas sensor is disclosed. The sensor includes electrodes produced from conductor layers, a capping layer, microcavities through the conductor layers and the capping layer, a cavity connecting the microcavities, and an electrolyte filling in the space created by the cavity and the microcavities in the substrate. The microcavities allow gases to pass through but retain the electrolyte through surface tension.
Public/Granted literature
- US20220244215A1 Microfabricated Electrochemical Gas Sensor Public/Granted day:2022-08-04
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