Invention Grant
- Patent Title: Sensor and inspection device
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Application No.: US17672097Application Date: 2022-02-15
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Publication No.: US11703530B2Publication Date: 2023-07-18
- Inventor: Akira Kikitsu , Satoshi Shirotori , Yoshihiro Higashi , Yoshinari Kurosaki
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP 21129777 2021.08.06
- Main IPC: G01R27/02
- IPC: G01R27/02 ; G01R25/00 ; G01R31/382 ; G01R17/10 ; G01R27/08 ; G01R27/14

Abstract:
According to one embodiment, a sensor includes an element part, and a control circuit part. The element part includes first and second elements. Each of the first and second elements includes a first magnetic element and a first conductive member. The control circuit part includes a first current circuit, a differential circuit, and a phase detection circuit. The first current circuit is configured to supply a first current to the first conductive member. The differential circuit is configured to output a differential signal corresponding to a difference of a first signal and a second signal. The first signal corresponds to a change in a first electrical resistance of the first magnetic element of the first element. The second signal corresponds to a change in a second electrical resistance of the first magnetic element of the second element. The phase detection circuit is configured to perform a phase detection of the differential signal.
Public/Granted literature
- US20230041879A1 SENSOR AND INSPECTION DEVICE Public/Granted day:2023-02-09
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