Invention Grant
- Patent Title: Isolation structure for active devices
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Application No.: US17081117Application Date: 2020-10-27
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Publication No.: US11705486B2Publication Date: 2023-07-18
- Inventor: Fu-Wei Yao , Chun Lin Tsai , Jiun-Lei Jerry Yu , Man-Ho Kwan
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US15703084 2017.09.13
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/20 ; H01L29/66 ; H01L21/76 ; H01L21/761 ; H01L29/778 ; H01L27/06 ; H01L27/085 ; H01L29/10 ; H01L21/8252 ; H01L21/8234

Abstract:
The present disclosure relates to an integrated chip. The integrated chip includes a first III-V semiconductor material over a substrate and a second III-V semiconductor material over the first III-V semiconductor material. The second III-V semiconductor material is a different material than the first III-V semiconductor material. A doped region has a horizontally extending segment and one or more vertically extending segments protruding vertically outward from the horizontally extending segment. The horizontally extending segment is arranged below the first III-V semiconductor material.
Public/Granted literature
- US20210043726A1 ISOLATION STRUCTURE FOR ACTIVE DEVICES Public/Granted day:2021-02-11
Information query
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