Invention Grant
- Patent Title: Charge-trapping layer with optimized number of charge-trapping sites for fast program and erase of a memory cell in a 3-dimensional NOR memory string array
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Application No.: US17222082Application Date: 2021-04-05
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Publication No.: US11705496B2Publication Date: 2023-07-18
- Inventor: Wu-Yi Henry Chien , Scott Brad Herner , Eli Harari
- Applicant: SUNRISE MEMORY CORPORATION
- Applicant Address: US CA San Jose
- Assignee: SUNRISE MEMORY CORPORATION
- Current Assignee: SUNRISE MEMORY CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: VLP Law Group LLP
- Agent Edward C. Kwok
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/792 ; H01L29/786 ; H10B43/30

Abstract:
A thin-film memory transistor includes a source region, a drain region, a channel region, a gate electrode, and a charge-trapping layer provided between the channel region and the gate electrode and electrically isolated therefrom, wherein the charge-trapping layer has includes a number of charge-trapping sites that is 70% occupied or evacuated using a single voltage pulse of a predetermined width of 500 nanoseconds or less and a magnitude of 15.0 volts or less. The charge-trapping layer comprises silicon-rich nitride may have a refractive index of 2.05 or greater or comprises nano-crystals of germanium (Ge), zirconium oxide (ZrO2), or zinc oxide (ZnO). The thin-film memory transistor may be implemented, for example, in a 3-dimensional array of NOR memory strings formed above a planar surface of a semiconductor substrate.
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