Invention Grant
- Patent Title: Vertical memory devices
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Application No.: US17038945Application Date: 2020-09-30
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Publication No.: US11706919B2Publication Date: 2023-07-18
- Inventor: Seokcheon Baek
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20200021414 2020.02.21
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L23/522 ; H10B41/10 ; H10B41/27 ; H10B43/10

Abstract:
A vertical memory device includes first horizontal gate electrodes disposed on a substrate and spaced apart from each other in a first direction that is substantially perpendicular to an upper surface of the substrate. Each of the first horizontal gate electrodes extends in a second direction that is substantially parallel to the upper surface of the substrate. A vertical channel extends through the first horizontal gate electrodes in the first direction. A charge storage structure is disposed between the vertical channel and each of the first horizontal gate electrodes. A first vertical gate electrode extends through the first horizontal gate electrodes in the first direction. The first vertical gate electrode is electrically insulated from the first horizontal gate electrodes. A first horizontal channel is disposed at a portion of each of the first horizontal gate electrodes adjacent to the first vertical gate electrode.
Public/Granted literature
- US20210265390A1 VERTICAL MEMORY DEVICES Public/Granted day:2021-08-26
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