Invention Grant
- Patent Title: Cross-point memory array and related fabrication techniques
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Application No.: US17174027Application Date: 2021-02-11
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Publication No.: US11706934B2Publication Date: 2023-07-18
- Inventor: Hernan A. Castro , Stephen H. Tang , Stephen W. Russell
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- The original application number of the division: US15961547 2018.04.24
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L27/11514 ; H01L45/00 ; H01L23/522 ; H01L21/768

Abstract:
Methods and apparatuses for a cross-point memory array and related fabrication techniques are described. The fabrication techniques described herein may facilitate concurrently building two or more decks of memory cells disposed in a cross-point architecture. Each deck of memory cells may include a plurality of first access lines (e.g., word lines), a plurality of second access lines (e.g., bit lines), and a memory component at each topological intersection of a first access line and a second access line. The fabrication technique may use a pattern of vias formed at a top layer of a composite stack, which may facilitate building a 3D memory array within the composite stack while using a reduced number of processing steps. The fabrication techniques may also be suitable for forming a socket region where the 3D memory array may be coupled with other components of a memory device.
Public/Granted literature
- US11653505B2 Cross-point memory array and related fabrication techniques Public/Granted day:2023-05-16
Information query
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