An intracellular delivery device (1) including, a piezoelectric substrate (3) having a working surface (8), at least one interdigitated transducer (5) located on and in contact with the working surface (8), and a receptacle (11) located on the working surface for accommodating cells to be targeted for intracellular delivery therein, wherein an alternating signal applied to the interdigitated transducer generates acoustic wave energy through the piezoelectric substrate that can be transferred to the accommodated cells.