Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices
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Application No.: US17076306Application Date: 2020-10-21
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Publication No.: US11711920B2Publication Date: 2023-07-25
- Inventor: Sunggil Kim , Seulye Kim , Jung-Hwan Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Fish & Richardson P.C.
- Priority: KR 1020200037050 2020.03.26
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H10B43/27 ; H10B41/27 ; H01L21/02

Abstract:
A semiconductor memory device includes a substrate with a cell array region and a connection region, an electrode structure including electrodes stacked on the substrate and having a staircase structure on the connection region, a vertical channel structure on the cell array region to penetrate the electrode structure and electrically connected to the substrate, a dummy structure on the connection region to penetrate the staircase structure, and a first sidewall oxide pattern interposed between the substrate and the dummy structure. The dummy structure includes an upper portion that is on the substrate, a middle portion that is in contact with the first sidewall oxide pattern, and a lower portion that is below the middle portion. With increasing vertical distance from the upper portion, a diameter of the middle portion decreases until it reaches its smallest value and then increases.
Public/Granted literature
- US20210305276A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2021-09-30
Information query
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