Invention Grant
- Patent Title: Plasma processing apparatus and control method
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Application No.: US17010035Application Date: 2020-09-02
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Publication No.: US11721528B2Publication Date: 2023-08-08
- Inventor: Taro Ikeda , Mikio Sato , Eiki Kamata
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JP 19162335 2019.09.05
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455 ; C23C16/52

Abstract:
There is provided a plasma processing apparatus including: a processing container; a first electrode provided inside the processing container and connected to a high-frequency power supply; a second electrode provided inside the processing container to face the first electrode, the second electrode being grounded; and a film thickness calculator connected to at least one of the first electrode and the second electrode and configured to calculate a thickness of a film deposited on the at least one of the first electrode and the second electrode.
Public/Granted literature
- US20210074517A1 PLASMA PROCESSING APPARATUS AND CONTROL METHOD Public/Granted day:2021-03-11
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