Invention Grant
- Patent Title: Large area group III nitride crystals and substrates, methods of making, and methods of use
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Application No.: US17173169Application Date: 2021-02-10
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Publication No.: US11721549B2Publication Date: 2023-08-08
- Inventor: Mark P. D'Evelyn , Wenkan Jiang , Drew W. Cardwell , Dirk Ehrentraut
- Applicant: SLT Technologies, Inc.
- Applicant Address: US CA Los Angeles
- Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee Address: US CA Los Angeles
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L29/36 ; H01L21/02

Abstract:
Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
Public/Granted literature
- US20210249266A1 LARGE AREA GROUP III NITRIDE CRYSTALS AND SUBSTRATES, METHODS OF MAKING, AND METHODS OF USE Public/Granted day:2021-08-12
Information query
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