Invention Grant
- Patent Title: Stacked field-effect transistors with a shielded output
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Application No.: US17527606Application Date: 2021-11-16
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Publication No.: US11721621B2Publication Date: 2023-08-08
- Inventor: Shweta Vasant Khokale , Kaustubh Shanbhag , Tamilmani Ethirajan
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/12 ; H01L21/84 ; H01L23/528

Abstract:
Structures including stacked field-effect transistors and methods of forming a structure including stacked field-effect transistors. The structure includes a field-effect transistor having a first active gate, a second active gate, and a drain region that is positioned in a horizontal direction between the first and second active gates. The structure further includes a back-end-of-line stack having a first metal level and a second metal level over the field-effect transistor. The first metal level includes a first interconnect, a second interconnect, and a third interconnect, and the second metal level includes a fourth interconnect. The third interconnect is connected to the drain region. The third interconnect is positioned in a vertical direction between the fourth interconnect and the drain region, and the third interconnect is positioned in the horizontal direction between the first and second interconnects.
Public/Granted literature
- US20230154844A1 STACKED FIELD-EFFECT TRANSISTORS WITH A SHIELDED OUTPUT Public/Granted day:2023-05-18
Information query
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