- 专利标题: MEMS-tunable optical ring resonator
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申请号: US17391126申请日: 2021-08-02
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公开(公告)号: US11722120B1公开(公告)日: 2023-08-08
- 发明人: Michael Wood , Alejandro J. Grine , Darwin K. Serkland , Alexander Ruyack
- 申请人: National Technology & Engineering Solutions of Sandia, LLC
- 申请人地址: US NM Albuquerque
- 专利权人: National Technology & Engineering Solutions of Sandia, LLC
- 当前专利权人: National Technology & Engineering Solutions of Sandia, LLC
- 当前专利权人地址: US NM Albuquerque
- 代理商 Mark A. Dodd
- 主分类号: H03H9/24
- IPC分类号: H03H9/24 ; B81B3/00 ; H03H9/02
摘要:
A microelectromechanical systems (MEMS)-tunable optical ring resonator is described herein. The ring resonator includes a resonator ring and a tuner ring, along with one or more springs. The springs may be internal or external, i.e., either within or outside the areal footprint of the resonator ring and the tuner ring. The one or more springs are configured to displace the tuner ring from the resonator ring by a desired gap based upon a desired resonant wavelength of the resonator ring. Tuning is implemented by applying a voltage to the ring resonator, with motion of the tuner ring causing a corresponding change in the effective index of the resonator ring. As the ring resonator is essentially a capacitive device, it draws very little power once tuning is achieved.
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