- 专利标题: Thermographic sensor with thermo-couples on a suspended grid and processing circuits in frames thereof
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申请号: US17537086申请日: 2021-11-29
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公开(公告)号: US11725990B2公开(公告)日: 2023-08-15
- 发明人: Maria Eloisa Castagna , Giuseppe Bruno
- 申请人: STMICROELECTRONICS S.r.l.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed Intellectual Property Law Group LLP
- 优先权: IT 2020000029138 2020.11.30
- 主分类号: G01J5/16
- IPC分类号: G01J5/16 ; G01J5/20 ; H01L27/146 ; H04N5/33 ; G01J5/00
摘要:
A thermographic sensor is proposed. The thermographic sensor includes a plurality of sensing elements each comprising at least one thermo-couple. The thermographic sensor is integrated on a semiconductor on insulator body that is patterned to define a grid suspended from a substrate; for each sensing element, the grid has a frame with the cold joint of the thermo-couple, a plate with the hot joint of the thermo-couple and one or more arms sustaining the plate from the frame. The frames include one or more conductive layers of thermally conductive material for thermally equalizing the cold joints with the substrate. Moreover, each sensing element may also include a processing circuit for the thermo-couple that is integrated on the corresponding frame. A thermographic device including the thermographic sensor and a corresponding signal processing circuit, and a system including one or more thermographic devices are also proposed.
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