NDIR detector device for detecting gases having an infrared absorption spectrum

    公开(公告)号:US11686673B2

    公开(公告)日:2023-06-27

    申请号:US17217662

    申请日:2021-03-30

    IPC分类号: G01N21/3504

    CPC分类号: G01N21/3504

    摘要: The device is formed in a casing including a support, a spacer body, and a mirror element fixed together. A light-emitting element and a light-receiving element are arranged on a bearing surface of the support and face a reflecting surface of the mirror element. The light-emitting element is configured to generate infrared radiation, and the light-receiving element is configured to receive light radiation reflected by the reflecting surface. The spacer body has an emission opening housing the light-emitting element and a reception opening housing the light-receiving element; the reception opening comprises a radiation-limitation portion configured to enable entry of reflected light radiation having an angle, with respect to a normal to the bearing surface, of less than a preset value.

    MICROREACTOR AND METHOD FOR LOADING A LIQUID
    3.
    发明申请
    MICROREACTOR AND METHOD FOR LOADING A LIQUID 审中-公开
    用于装载液体的微型反应器和方法

    公开(公告)号:US20140291152A1

    公开(公告)日:2014-10-02

    申请号:US14221033

    申请日:2014-03-20

    IPC分类号: B01L3/00 C12Q1/68

    摘要: A microreactor includes: a substrate (2; 102; 202) made of semiconductor material; a plurality of wells (5; 105; 205) separated by walls (6; 106; 206) in the substrate (2; 102; 202); a dielectric structure (7; 107; 207a, 207b) coating at least the top of the walls (6; 106; 206); a cap (3; 103; 203), bonded to the substrate (2; 102; 202) and defining a chamber (10; 110; 210) above the wells (5; 105; 205); and a biasing structure (2, 8, 13; 102, 108, 113; 202, 208a, 208b, 213), configured for setting up a voltage (VB) between the substrate (2; 102; 202) and the chamber (10; 110; 210).

    摘要翻译: 微反应器包括:由半导体材料制成的衬底(2; 102; 202) 在所述衬底(2; 102; 202)中被壁(6; 106; 206)隔开的多个孔(5; 105; 205); 涂覆至少所述壁(6; 106; 206)的顶部的电介质结构(7; 107; 207a,207b); 盖子(3; 103; 203),其结合到所述基底(2; 102; 202)并且在所述孔(5; 105; 205)上方限定腔室(10; 110; 210) 以及偏置结构(2,8,13; 102,108,113; 202,208a,208b,213),其被配置用于在所述基板(2; 102; 202)和所述腔室(10)之间建立电压(VB) ; 110; 210)。

    Thermographic sensor with thermo-couples on a suspended grid and processing circuits in frames thereof

    公开(公告)号:US12055441B2

    公开(公告)日:2024-08-06

    申请号:US18335003

    申请日:2023-06-14

    摘要: A thermographic sensor is proposed. The thermographic sensor includes a plurality of sensing elements each comprising at least one thermo-couple. The thermographic sensor is integrated on a semiconductor on insulator body that is patterned to define a grid suspended from a substrate; for each sensing element, the grid has a frame with the cold joint of the thermo-couple, a plate with the hot joint of the thermo-couple and one or more arms sustaining the plate from the frame. The frames include one or more conductive layers of thermally conductive material for thermally equalizing the cold joints with the substrate. Moreover, each sensing element may also include a processing circuit for the thermo-couple that is integrated on the corresponding frame. A thermographic device including the thermographic sensor and a corresponding signal processing circuit, and a system including one or more thermographic devices are also proposed.

    Radiation sensor with an integrated mechanical optical modulator and related manufacturing process

    公开(公告)号:US12066324B2

    公开(公告)日:2024-08-20

    申请号:US17530785

    申请日:2021-11-19

    IPC分类号: G01J1/36 H01L33/46

    摘要: Radiation sensor including a detection assembly and a chopper assembly, which are mechanically coupled to delimit a main cavity; and wherein the chopper assembly includes: a suspended movable structure, which extends in the main cavity; and an actuation structure, which is electrically controllable to cause a change of position of the suspended movable structure. The detection unit includes a detection structure, which faces the main cavity and includes a number of detection devices. The suspended movable structure includes a first shield of conductive material, which shields the detection devices from the radiation, the shielding of the detection devices being a function of the position of the suspended movable structure.

    Thermographic sensor with thermo-couples on a suspended grid and processing circuits in frames thereof

    公开(公告)号:US11725990B2

    公开(公告)日:2023-08-15

    申请号:US17537086

    申请日:2021-11-29

    摘要: A thermographic sensor is proposed. The thermographic sensor includes a plurality of sensing elements each comprising at least one thermo-couple. The thermographic sensor is integrated on a semiconductor on insulator body that is patterned to define a grid suspended from a substrate; for each sensing element, the grid has a frame with the cold joint of the thermo-couple, a plate with the hot joint of the thermo-couple and one or more arms sustaining the plate from the frame. The frames include one or more conductive layers of thermally conductive material for thermally equalizing the cold joints with the substrate. Moreover, each sensing element may also include a processing circuit for the thermo-couple that is integrated on the corresponding frame. A thermographic device including the thermographic sensor and a corresponding signal processing circuit, and a system including one or more thermographic devices are also proposed.

    NDIR detector device for detecting gases having an infrared absorption spectrum

    公开(公告)号:US11079321B2

    公开(公告)日:2021-08-03

    申请号:US16584808

    申请日:2019-09-26

    IPC分类号: G01N21/3504

    摘要: The device is formed in a casing including a support, a spacer body, and a mirror element fixed together. A light-emitting element and a light-receiving element are arranged on a bearing surface of the support and face a reflecting surface of the mirror element. The light-emitting element is configured to generate infrared radiation, and the light-receiving element is configured to receive light radiation reflected by the reflecting surface. The spacer body has an emission opening housing the light-emitting element and a reception opening housing the light-receiving element; the reception opening comprises a radiation-limitation portion configured to enable entry of reflected light radiation having an angle, with respect to a normal to the bearing surface, of less than a preset value.

    Microreactor and method for loading a liquid

    公开(公告)号:US10518264B2

    公开(公告)日:2019-12-31

    申请号:US14221033

    申请日:2014-03-20

    IPC分类号: B01L3/00 C12Q1/6844

    摘要: A microreactor includes: a substrate (2; 102; 202) made of semiconductor material; a plurality of wells (5; 105; 205) separated by walls (6; 106; 206) in the substrate (2; 102; 202); a dielectric structure (7; 107; 207a, 207b) coating at least the top of the walls (6; 106; 206); a cap (3; 103; 203), bonded to the substrate (2; 102; 202) and defining a chamber (10; 110; 210) above the wells (5; 105; 205); and a biasing structure (2, 8, 13; 102, 108, 113; 202, 208a, 208b, 213), configured for setting up a voltage (VB) between the substrate (2; 102; 202) and the chamber (10; 110; 210).

    SENSOR COMPRISING AT LEAST A VERTICAL DOUBLE JUNCTION PHOTODIODE, BEING INTEGRATED ON A SEMICONDUCTOR SUBSTRATE AND CORRESPONDING INTEGRATION PROCESS
    9.
    发明申请
    SENSOR COMPRISING AT LEAST A VERTICAL DOUBLE JUNCTION PHOTODIODE, BEING INTEGRATED ON A SEMICONDUCTOR SUBSTRATE AND CORRESPONDING INTEGRATION PROCESS 审中-公开
    传感器至少包含垂直双结结构光电子体,集成在半导体基板上和相应的集成工艺

    公开(公告)号:US20130264949A1

    公开(公告)日:2013-10-10

    申请号:US13802081

    申请日:2013-03-13

    IPC分类号: H01L31/11 H05B37/02

    摘要: An embodiment relates to a sensor being integrated on a semiconductor substrate and comprising at least a vertical double-junction photodiode, in turn comprising at least one first and one second p-n junction formed in said semiconductor substrate, as well as at least an anti-reflection coating formed on said photodiode. Said at least one anti-reflection coating comprises at least one first and one second different anti-reflection layer being suitable to obtain a responsivity peak in correspondence with a predetermined wavelength of an incident optical signal on said sensor. An embodiment also relates to an integration process of such a sensor, as well as to an ambient light sensor made by means of such a sensor.

    摘要翻译: 一个实施例涉及集成在半导体衬底上并包括至少一个垂直双结光电二极管的传感器,其又包括形成在所述半导体衬底中的至少一个第一和一个第二pn结,以及至少一个抗反射 在所述光电二极管上形成的涂层。 所述至少一个防反射涂层包括至少一个第一和第二不同的抗反射层,适合于获得与所述传感器上的入射光信号的预定波长对应的响应峰。 实施例还涉及这种传感器的集成过程,以及通过这种传感器制造的环境光传感器。