- 专利标题: Magnetic property measuring systems, methods for measuring magnetic properties, and methods for manufacturing magnetic memory devices using the same
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申请号: US17316973申请日: 2021-05-11
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公开(公告)号: US11727973B2公开(公告)日: 2023-08-15
- 发明人: Eunsun Noh , Juhyun Kim , Ung Hwan Pi
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 分案原申请号: US15933659 2018.03.23
- 主分类号: G11C11/16
- IPC分类号: G11C11/16 ; G01R33/09 ; H10N50/01 ; H10N50/85
摘要:
A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.
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