Invention Grant
- Patent Title: Resonator, linear accelerator, and ion implanter having adjustable pickup loop
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Application No.: US17513243Application Date: 2021-10-28
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Publication No.: US11728133B2Publication Date: 2023-08-15
- Inventor: Keith E. Kowal
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDW Firm PLLC
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/317 ; H01J37/30

Abstract:
An apparatus may include an exciter, disposed within a resonance chamber, to generate an RF power signal. The apparatus may include a resonator coil, disposed within the resonance chamber, to receive the RF power signal, and generate an RF output signal; and a pickup loop assembly, to receive the RF output signal and output a pickup voltage signal. The pickup loop assembly may include a pickup loop, disposed within the resonance chamber; and a variable attenuator, disposed at least partially between the resonator coil and the pickup loop. The variable attenuator may include a configurable portion, movable from a first position, attenuating a first amount of the RF output signal, to a second position, attenuating a second amount of the RF output signal, different from the first amount.
Public/Granted literature
- US20230134262A1 RESONATOR, LINEAR ACCELERATOR, AND ION IMPLANTER HAVING ADJUSTABLE PICKUP LOOP Public/Granted day:2023-05-04
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