Invention Grant
- Patent Title: Lateral-type vacuum deposition apparatus, and source block and source assembly for the same
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Application No.: US16596558Application Date: 2019-10-08
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Publication No.: US11732344B2Publication Date: 2023-08-22
- Inventor: Ji-Man Seo , Hoyoung Jeong , Jaewook Park
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Seed IP Law Group LLP
- Priority: KR 20180120580 2018.10.10
- Main IPC: C23C14/24
- IPC: C23C14/24 ; H10K71/00

Abstract:
The present disclosure relates to a lateral-type vacuum deposition apparatus, and a source block and a source assembly for the same. Disclosed are a source block that may simplify a lateral-type vacuum deposition apparatus and a lateral-type vacuum deposition apparatus using the same. The source block has a predetermined shape. In the lateral-type vacuum deposition apparatus, the substrate and the source block may face away each other. Accordingly, the lateral-type vacuum deposition apparatus including the source block is free of a conduit for transferring a vaporized source to a nozzle, thereby simplifying a structure of the apparatus. In particular, the source block may have a visible light transmittance of at least about 10% and may exhibit excellent shape maintenance ability during a lateral-type vacuum deposition process.
Information query
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