- 专利标题: Polishing apparatus and method of controlling inclination of stationary ring
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申请号: US16724504申请日: 2019-12-23
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公开(公告)号: US11745306B2公开(公告)日: 2023-09-05
- 发明人: Tomoko Owada , Makoto Fukushima , Keisuke Namiki , Osamu Nabeya , Shingo Togashi , Satoru Yamaki , Yoshikazu Kato
- 申请人: Ebara Corporation
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Venjuris, P.C.
- 优先权: JP 18244439 2018.12.27
- 主分类号: B24B49/04
- IPC分类号: B24B49/04 ; B24B41/047
摘要:
A polishing apparatus includes a rotatable head body having a pressing surface, a retainer ring configured to press a polishing surface while rotating together with the head body, a stationary ring, local load applying devices configured to apply a local load to the stationary ring, and a controller. The local load applying devices include a first pressing member and a second pressing member connected to the stationary ring. The first pressing member is disposed in the upstream side of the retainer ring in the traveling direction of the polishing surface, and the second pressing member is disposed in the downstream side. The controller calculates the inclination angle of the stationary ring based on a measured value of the height of at least one of the first pressing member and the second pressing member.
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