- 专利标题: Compact line scan mems time of flight system with actuated lens
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申请号: US17124027申请日: 2020-12-16
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公开(公告)号: US11747611B2公开(公告)日: 2023-09-05
- 发明人: Christopher Townsend , Roberto Carminati
- 申请人: STMicroelectronics (Research & Development) Limited , STMicroelectronics S.r.l.
- 申请人地址: GB Marlow
- 专利权人: STMicroelectronics (Research & Development) Limited,STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics (Research & Development) Limited,STMicroelectronics S.r.l.
- 当前专利权人地址: GB Marlow; IT Agrate Brianza
- 代理机构: CROWE & DUNLEVY
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G01S17/894 ; G02B26/08
摘要:
An optical module includes an optical detector, laser emitter, and first and second support structures, each carried by a substrate. An optical layer includes first and second fixed portions carried by the support structures, a movable portion affixed between the fixed portions by a spring structure, and a lens system carried by the movable portion, the lens system including an objective lens and a beam shaping lens. The optical layer includes a comb drive with a first comb structure extending from the first fixed portion to interdigitate with a second comb structure extending from the movable portion, a third comb structure extending from the second fixed portion to interdigitate with a fourth comb structure extending from the movable portion, and actuation circuitry applying voltages to the comb structures to cause the movable portion of the optical layer to oscillate back and forth between the fixed portions.
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