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公开(公告)号：US11747611B2
公开(公告)日：2023-09-05
申请号：US17124027
申请日：2020-12-16
IPC分类号： G02B26/10 , G01S17/894 , G02B26/08
CPC分类号： G02B26/101 , G01S17/894 , G02B26/0858
摘要： An optical module includes an optical detector, laser emitter, and first and second support structures, each carried by a substrate. An optical layer includes first and second fixed portions carried by the support structures, a movable portion affixed between the fixed portions by a spring structure, and a lens system carried by the movable portion, the lens system including an objective lens and a beam shaping lens. The optical layer includes a comb drive with a first comb structure extending from the first fixed portion to interdigitate with a second comb structure extending from the movable portion, a third comb structure extending from the second fixed portion to interdigitate with a fourth comb structure extending from the movable portion, and actuation circuitry applying voltages to the comb structures to cause the movable portion of the optical layer to oscillate back and forth between the fixed portions.
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公开(公告)号：US11933968B2
公开(公告)日：2024-03-19
申请号：US17964672
申请日：2022-10-12
CPC分类号： G02B26/0858 , G02B26/101 , G03B21/008 , H02N2/028
摘要： A microelectromechanical (MEMS) structure includes a fixed frame internally defining a cavity, and a mobile mass suspended in the cavity and movable with a first resonant rotational mode about a first rotation axis and with a second resonant rotational mode about a second rotation axis orthogonal to the first. A pair of supporting elements extends in the cavity, is rigidly coupled to the fixed frame, and is elastically deformable to cause rotation of the mobile mass about the first rotation axis. A pair of elastic-coupling elements is elastically coupled between the mobile mass and the first pair of supporting elements. Each of the elastic-coupling elements includes a first and second elastic portions, the first elastic portion being compliant to torsion about the second rotation axis. The second elastic portion is compliant to bending outside of a horizontal plane of main extension of the MEMS structure.
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公开(公告)号：US11675186B2
公开(公告)日：2023-06-13
申请号：US16591854
申请日：2019-10-03
CPC分类号： G02B26/105 , B81C1/00317 , B81C1/00523 , G02B26/0833 , B81B2201/042 , B81C2203/0109 , B81C2203/019
摘要： A method for making a micro-electro mechanical (MEMS) device includes forming a MEMS mirror stack on a handle layer, and applying a first bonding layer to the MEMS mirror stack. The method continues with disposing a substrate on the first bonding layer such that the MEMS mirror stack is mechanically anchored to the substrate and so as to seal against ingress of environmental contaminants, removing the handle layer, and applying a second bonding layer to the MEMS mirror stack. A cap layer is disposed on the second bonding layer such that the cap layer is mechanically anchored to the MEMS mirror stack and so as to seal against ingress of environmental contaminants.
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公开(公告)号：US11655140B2
公开(公告)日：2023-05-23
申请号：US17126929
申请日：2020-12-18
CPC分类号： B81B3/0072 , B81B3/0021 , G02B26/0858 , G03B21/008 , H01L41/09 , H04N9/3152 , B81B2201/042
摘要： A micro-electro-mechanical device is formed by a fixed structure having a cavity. A tiltable structure is elastically suspended over the cavity and has a main extension in a tiltable plane and is rotatable about a rotation axis parallel to the tiltable plane. A piezoelectric actuation structure includes first and second driving arms carrying respective piezoelectric material regions and extending on opposite sides of the rotation axis. The first and the second driving arms are rigidly coupled to the fixed structure and are elastically coupled to the tiltable structure. During operation, a stop structure limits movements of the tiltable structure with respect to the actuation structure along a planar direction perpendicular to the rotation axis. The stop structure has a first planar stop element formed between the first driving arm and the tiltable structure and a second planar stop element formed between the second driving arm and the tiltable structure.
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公开(公告)号：US10407301B2
公开(公告)日：2019-09-10
申请号：US15870429
申请日：2018-01-12
发明人： Enri Duqi , Lorenzo Baldo , Roberto Carminati
摘要： MEMS device, in which a body made of semiconductor material contains a chamber, and a first column inside the chamber. A cap of semiconductor material is attached to the body and forms a first membrane, a first cavity and a first channel. The chamber is closed on the side of the cap. The first membrane, the first cavity, the first channel and the first column form a capacitive pressure sensor structure. The first membrane is arranged between the first cavity and the second face, the first channel extends between the first cavity and the first face or between the first cavity and the second face and the first column extends towards the first membrane and forms, along with the first membrane, plates of a first capacitor element.
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6.发明申请公开(公告)号：US20180180871A1
公开(公告)日：2018-06-28
申请号：US15603614
申请日：2017-05-24
发明人： Sonia Costantini , Marta Carminati , Daniela Angela Luisa Gatti , Laura Maria Castoldi , Roberto Carminati
CPC分类号： G02B26/0833 , B81B3/0083 , B81B2201/032 , B81B2201/042 , B81B2203/0307 , B81B2203/058 , B81C1/00714 , B81C2203/032 , G02B26/105
摘要： A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.
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公开(公告)号：US20180031823A1
公开(公告)日：2018-02-01
申请号：US15465742
申请日：2017-03-22
IPC分类号： G02B26/08 , H01L41/332 , G03B21/00 , H01L41/053
CPC分类号： G02B26/0858 , G03B21/008 , H01L41/053 , H01L41/332
摘要： An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.
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公开(公告)号：US09835850B2
公开(公告)日：2017-12-05
申请号：US14961507
申请日：2015-12-07
CPC分类号： G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
摘要： A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
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9.发明申请公开(公告)号：US20170269355A1
公开(公告)日：2017-09-21
申请号：US15280704
申请日：2016-09-29
CPC分类号： G02B26/103 , G02B6/0006 , G02B6/322 , G02B6/3502 , G02B6/3506 , G02B6/3508 , G02B6/4202 , G02B6/4225 , G02B6/4226 , G03B21/28 , H01S5/02284 , H04N9/3129
摘要： A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.
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10.发明申请公开(公告)号：US20170268880A1
公开(公告)日：2017-09-21
申请号：US15610251
申请日：2017-05-31
IPC分类号： G01C19/5712 , G01C19/5733 , B81B3/00 , G01C19/5747
CPC分类号： G01C19/5712 , B81B3/0018 , B81B3/0086 , B81B2201/025 , B81B2203/0163 , G01C19/5733 , G01C19/5747
摘要： MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.
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