- 专利标题: Protective shutter for charged particle microscope
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申请号: US17353317申请日: 2021-06-21
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公开(公告)号: US11749496B2公开(公告)日: 2023-09-05
- 发明人: Philip Brundage
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 主分类号: H01J37/28
- IPC分类号: H01J37/28 ; H01J37/26 ; H01J37/32 ; H01J37/34
摘要:
Disclosed herein are techniques directed toward a protective shutter for a charged particle microscope. An example apparatus at least includes a charged particle column and a focused ion beam (FIB) column, a gas injection nozzle coupled to a translation device, the translation device configured to insert the gas injection nozzle in close proximity to a stage, and a shutter coupled to the gas injection nozzle and arranged to be disposed between the sample and the SEM column when the gas injection nozzle is inserted in close proximity to the stage.
公开/授权文献
- US20220406562A1 PROTECTIVE SHUTTER FOR CHARGED PARTICLE MICROSCOPE 公开/授权日:2022-12-22
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