Disclosed is a holding system for supporting a wafer having a first surface, a second surface and a third surface joining the first and second surfaces, and an optical element having a first surface, a second surface and a third surface joining the first and second surfaces, the holding system including: a support including first support unit configured to support the second and/or third surface of the wafer and second support unit configured to support the second and/or third surface of the optical element; a positioning unit configured to position the second surface of the wafer relative to the first surface of the optical element; and a mechanical unit configured to move the first and second support units one relative to the other so as to move the second surface of the wafer and the first surface of the optical element to form an optical system.