Invention Grant
- Patent Title: MEMS device with electrodes and a dielectric
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Application No.: US18079519Application Date: 2022-12-12
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Publication No.: US11753295B2Publication Date: 2023-09-12
- Inventor: Peter V. Loeppert , Michael Pedersen
- Applicant: Knowles Electronics, LLC
- Applicant Address: US IL Itasca
- Assignee: Knowles Electronics, LLC
- Current Assignee: Knowles Electronics, LLC
- Current Assignee Address: US IL Itasca
- Agency: Loppnow & Chapa
- Agent Matthew C. Loppnow
- Main IPC: B81B7/04
- IPC: B81B7/04 ; B81C1/00 ; B81B3/00

Abstract:
A MEMS device can include a solid dielectric including a plurality of apertures, the solid dielectric having a first side and a second side. The MEMS device can include a first plurality of electrodes extending completely through a first subset of the plurality of apertures, a second plurality of electrodes extending partially through a second subset of the plurality of apertures, a third plurality of electrodes extending partially into a third subset of the plurality of apertures. The MEMS device can include a first diaphragm coupled to the first plurality and to the third plurality of electrodes, the first diaphragm facing the first side of the solid dielectric. The MEMS device can include a second diaphragm coupled to the first plurality and to the second plurality of electrodes the second diaphragm facing the second side of the solid dielectric.
Public/Granted literature
- US20230166966A1 MEMS DEVICE WITH ELECTRODES AND A DIELECTRIC Public/Granted day:2023-06-01
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