Invention Grant
- Patent Title: Molybdenum containing targets
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Application No.: US17038325Application Date: 2020-09-30
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Publication No.: US11753702B2Publication Date: 2023-09-12
- Inventor: Gary Alan Rozak , Mark E. Gaydos , Patrick Alan Hogan , Shuwei Sun
- Applicant: H.C. STARCK, INC.
- Applicant Address: US MA Newton
- Assignee: H.C. Starck Solutions Euclid, LLC
- Current Assignee: H.C. Starck Solutions Euclid, LLC
- Current Assignee Address: US OH Euclid
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: C22C45/10
- IPC: C22C45/10 ; C22C1/04 ; C22C27/04 ; C23C14/34 ; C23C14/18 ; C23C14/58 ; G06F3/041

Abstract:
The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of niobium or vanadium, and a third metal element selected from the group consisting of titanium, chromium, niobium, vanadium, and tantalum, wherein the third metal element is different from the second metal element, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in the second metal element, and a phase that is rich in the third metal element.
Public/Granted literature
- US20210079512A1 MOLYBDENUM CONTAINING TARGETS Public/Granted day:2021-03-18
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