- 专利标题: MIM efuse memory devices and fabrication method thereof
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申请号: US17396398申请日: 2021-08-06
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公开(公告)号: US11756640B2公开(公告)日: 2023-09-12
- 发明人: Meng-Sheng Chang , Chia-En Huang , Yih Wang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: FOLEY & LARDNER LLP
- 主分类号: G11C17/00
- IPC分类号: G11C17/00 ; G11C17/16 ; H10B20/20
摘要:
A memory device is disclosed. The memory device includes a plurality of memory cells, each of the memory cells including an access transistor and a resistor coupled to each other in series. The resistors of the memory cells are each formed as one of a plurality of interconnect structures disposed over a substrate. The access transistors of the memory cells are disposed opposite a first metallization layer containing the plurality of interconnect structures from the substrate.
公开/授权文献
- US20230043443A1 MIM EFUSE MEMORY DEVICES AND FABRICATION METHOD THEREOF 公开/授权日:2023-02-09
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