Invention Grant
- Patent Title: Rotating sample holder for random angle sampling in tomography
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Application No.: US17649917Application Date: 2022-02-03
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Publication No.: US11756762B2Publication Date: 2023-09-12
- Inventor: Bart Jozef Janssen , Edwin Verschueren , Erik Franken
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/20
- IPC: H01J37/20

Abstract:
A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.
Public/Granted literature
- US20220157557A1 ROTATING SAMPLE HOLDER FOR RANDOM ANGLE SAMPLING IN TOMOGRAPHY Public/Granted day:2022-05-19
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