Invention Grant
- Patent Title: Apparatus and method for die stack flux removal
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Application No.: US17117762Application Date: 2020-12-10
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Publication No.: US11756805B2Publication Date: 2023-09-12
- Inventor: John Taddei , Kenji Nulman , Jonathan Fijal , Phillip Tyler , Ian Rafter
- Applicant: Veeco Instruments Inc.
- Applicant Address: US NY Plainview
- Assignee: VEECO INSTRUMENTS INC.
- Current Assignee: VEECO INSTRUMENTS INC.
- Current Assignee Address: US NY Plainview
- Agency: Leason Ellis LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B23K1/20 ; B08B3/04 ; B08B3/02 ; H01L21/02 ; B08B5/02
Abstract:
A system for removing flux from openings formed in a substrate that has openings (e.g., sized 20 microns or less) formed therein includes a spay nozzle device that has a spray nozzle arm that is formed at an angle of about 45 degrees or less for discharging fluid towards the openings in the substrate for flux removal. The angle is between about 30 degrees and 45 degrees.
Public/Granted literature
- US20210202272A1 APPARATUS AND METHOD FOR DIE STACK FLUX REMOVAL Public/Granted day:2021-07-01
Information query
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