- 专利标题： Pick and place machine cleaning system and method
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申请号： US16460929申请日： 2019-07-02
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公开(公告)号： US11756811B2公开(公告)日： 2023-09-12
- 发明人: Alan E. Humphrey , Bret A. Humphrey , Jerry J. Broz , Wayne C. Smith
- 申请人： International Test Solutions, Inc.
- 申请人地址： US NV Reno
- 专利权人： International Test Solutions, LLC
- 当前专利权人： International Test Solutions, LLC
- 当前专利权人地址： US NV Reno
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; B65G47/91 ; B08B1/02 ; B08B7/00 ; H01L21/683
摘要：
A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.
公开/授权文献
- US20210005483A1 PICK AND PLACE MACHINE CLEANING SYSTEM AND METHOD 公开/授权日：2021-01-07
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