- 专利标题: Daisy-chain seal ring structure
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申请号: US17448002申请日: 2021-09-17
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公开(公告)号: US11756842B2公开(公告)日: 2023-09-12
- 发明人: Chun-Liang Lu , Chun-Wei Chia , Chun-Hao Chou , Kuo-Cheng Lee
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Harrity & Harrity, LLP
- 主分类号: H01L23/58
- IPC分类号: H01L23/58 ; H01L29/10 ; H01L21/66 ; H01L23/00
摘要:
A semiconductor device includes a first wafer and a second wafer. The semiconductor device includes a seal ring structure comprising a first metal structure in a body of the first wafer, a second metal structure in the body of the first wafer, a third metal structure in a body of the second wafer, and a metal bonding structure including a first set of metal elements coupling the first metal structure and the third metal structure through an interface between the first wafer and the second wafer, and a second set of metal elements coupling the second metal structure and the third metal structure through the interface between the first wafer and the second wafer.
公开/授权文献
- US20220336299A1 DAISY-CHAIN SEAL RING STRUCTURE 公开/授权日:2022-10-20
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