- Patent Title: Method of manufacturing a glass article to provide increased bonding of metal to a glass substrate via the generation of a metal oxide layer, and glass articles such as glass interposers including the metal oxide layer
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Application No.: US17846320Application Date: 2022-06-22
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Publication No.: US11756847B2Publication Date: 2023-09-12
- Inventor: Kaveh Adib , Philip Simon Brown , Mandakini Kanungo , Prantik Mazumder , Rajesh Vaddi
- Applicant: CORNING INCORPORATED
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Kevin L. Bray
- The original application number of the division: US17217027 2021.03.30
- Main IPC: H01L23/15
- IPC: H01L23/15 ; C23C26/00 ; H01L21/48 ; H01L23/498

Abstract:
A method of manufacturing a glass article comprises: (A) forming a first layer of catalyst metal on a glass substrate; (B) heating the glass substrate; (C) forming a second layer of an alloy of a first metal and a second metal on the first layer; (D) heating the glass substrate, thereby forming a glass article comprising: (i) the glass substrate; (ii) an oxide of the first metal covalently bonded thereto; and (iii) a metallic region bonded to the oxide, the metallic region comprising the catalyst, first, and second metals. In embodiments, the method further comprises (E) forming a third layer of a primary metal on the metallic region; and (F) heating the glass article thereby forming the glass article comprising: (i) the oxide of the first metal covalently bonded the glass substrate; and (ii) a new metallic region bonded to the oxide comprising the catalyst, first, second, and primary metals.
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