Invention Grant
- Patent Title: Hybrid bonding structure and hybrid bonding method
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Application No.: US17525964Application Date: 2021-11-15
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Publication No.: US11756922B2Publication Date: 2023-09-12
- Inventor: Ran He , Huifang Jiao , Yufeng Dai , Guanglin Yang , Chihon Ho , Ronghua Xie
- Applicant: HUAWEI TECHNOLOGIES CO., LTD.
- Applicant Address: CN Guangdong
- Assignee: HUAWEI TECHNOLOGIES CO., LTD.
- Current Assignee: HUAWEI TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: HUAWEI TECHNOLOGIES CO., LTD.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L23/00

Abstract:
Embodiments of this application disclose a hybrid bonding structure and a hybrid bonding method. The hybrid bonding structure includes a first chip and a second chip. A surface of the first chip includes a first insulation dielectric and a first metal, and a first gap area exists between the first metal and the first insulation dielectric. A surface of the second chip includes a second insulation dielectric and a second metal. A surface of the first metal is higher than a surface of the first insulation dielectric. Metallic bonding is formed after the first metal is in contact with the second metal, and the first metal is longitudinally and transversely deformed in the first gap area. Insulation dielectric bonding is formed after the first insulation dielectric is in contact with the second insulation dielectric.
Public/Granted literature
- US20220077105A1 HYBRID BONDING STRUCTURE AND HYBRID BONDING METHOD Public/Granted day:2022-03-10
Information query
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