Invention Grant
- Patent Title: Optical device
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Application No.: US17570763Application Date: 2022-01-07
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Publication No.: US11761906B2Publication Date: 2023-09-19
- Inventor: Yasuhiro Hidaka , Mitsunori Numata
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: JP 21001199 2021.01.07 KR 20210141900 2021.10.22
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01B11/24 ; G01N21/88

Abstract:
An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.
Public/Granted literature
- US20220214288A1 OPTICAL DEVICE Public/Granted day:2022-07-07
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