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公开(公告)号：US20240201104A1
公开(公告)日：2024-06-20
申请号：US18533528
申请日：2023-12-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： KENJI SUZUKI , Ingi Kim , Mitsunori Numata , Shinji Ueyama , Tomoki Onishi
CPC classification number: G01N21/9501 , G01N21/01 , G01N35/0099
Abstract: An inspection device improves accuracy characteristics of an (MRAM), the inspection device including a stage on which a MRAM element is fixed, and electromagnets generating a first magnetic field. A magnetic field having a component in a direction perpendicular to the stage is changeable from a first direction to a second direction according to a position on the stage. A second magnetic field in which a direction of a magnetic field component is parallel to the stage changes from a third direction to a fourth direction according to the position on the stage, an optical system illuminating the MRAM element with light including polarized light, and condensing reflected light from reflected illumination light from the MRAM element, and a detector detecting reflected light when the position of the MRAM element is changed, and when the position of the MRAM element in the second magnetic field is changed.
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公开(公告)号：US11761906B2
公开(公告)日：2023-09-19
申请号：US17570763
申请日：2022-01-07
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yasuhiro Hidaka , Mitsunori Numata
CPC classification number: G01N21/9501 , G01B11/24 , G01N21/8806 , G01N21/8851
Abstract: An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.
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3.发明授权Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatus 有权照明装置，光学检查装置以及使用该照明装置的光学显微镜公开(公告)号：US09594240B2
公开(公告)日：2017-03-14
申请号：US14559337
申请日：2014-12-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Nobuyuki Kimura , Mitsuhiro Togashi , Masaki Takada , Mitsunori Numata
CPC classification number: G02B21/06 , G02B6/0008 , G02B6/03694 , G02B21/0016 , G02B21/082 , G02B27/0994
Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.
Abstract translation: 提供了一种照明装置，以及使用该照明装置的光学检查装置和光学显微镜。 照明装置包括发光的光源，输出比预定的光线角度分布更均匀地强的光的光学装置; 具有多次反射光的多反射装置，具有光入射面的多反射装置和发射多重反射光的发光面，以及扩散装置，其将从发光面发射的光扩散到 多反射装置。 光源，光学器件，多反射器件和光扩散器件共享光路。
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公开(公告)号：US10429315B2
公开(公告)日：2019-10-01
申请号：US16037088
申请日：2018-07-17
Applicant: Samsung Electronics Co., Ltd.
Inventor： Akio Ishikawa , Ken Ozawa , Kwang-Soo Kim , Sean Park , Mitsunori Numata
IPC: G01N21/00 , G01N21/88 , G02B27/42 , G06T7/00 , G01N21/956
Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.
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Patent Agency Ranking
公开(公告)号：US09453800B2
公开(公告)日：2016-09-27
申请号：US14142093
申请日：2013-12-27
Applicant: Samsung Electronics Co., Ltd.
Inventor： Akio Ishikawa , Mitsuhiro Togashi , Mitsunori Numata
IPC: G01N21/21 , G01N21/95 , G01N21/88 , G01N21/956
CPC classification number: G01N21/8806 , G01N21/21 , G01N21/956 , G01N21/95607 , G01N21/95623 , G01N2021/8825 , G01N2021/8848
Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.
Abstract translation: 用于检测物体的缺陷的装置可以包括配置为发射具有不同偏振方向的直线偏振光的光发射器，具有直线偏振光选择性地通过的开口的空间滤光器，被配置为冷凝直线偏振光的光学构件， 其穿过物体上的开口，以及被配置为检测从物体反射的光的光检测器。 因此，可以在短时间内精确地检测缺陷。
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公开(公告)号：US12228499B2
公开(公告)日：2025-02-18
申请号：US18111229
申请日：2023-02-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jaehwang Jung , Yasuhiro Hidaka , Mitsunori Numata , Wookrae Kim , Jinseob Kim , Myungjun Lee
Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.
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公开(公告)号：US11604136B2
公开(公告)日：2023-03-14
申请号：US17204059
申请日：2021-03-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jaehwang Jung , Yasuhiro Hidaka , Mitsunori Numata , Wookrae Kim , Jinseob Kim , Myungjun Lee
Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.
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公开(公告)号：US20220214288A1
公开(公告)日：2022-07-07
申请号：US17570763
申请日：2022-01-07
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yasuhiro Hidaka , Mitsunori Numata
Abstract: An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.
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公开(公告)号：US20140185044A1
公开(公告)日：2014-07-03
申请号：US14142093
申请日：2013-12-27
Applicant: Samsung Electronics Co., Ltd.
Inventor： Akio Ishikawa , Mitsuhiro Togashi , Mitsunori Numata
IPC: G01N21/88
CPC classification number: G01N21/8806 , G01N21/21 , G01N21/956 , G01N21/95607 , G01N21/95623 , G01N2021/8825 , G01N2021/8848
Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.
Abstract translation: 用于检测物体的缺陷的装置可以包括配置为发射具有不同偏振方向的直线偏振光的光发射器，具有直线偏振光选择性地通过的开口的空间滤光器，被配置为冷凝直线偏振光的光学构件， 其穿过物体上的开口，以及被配置为检测从物体反射的光的光检测器。 因此，可以在短时间内精确地检测缺陷。
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