Invention Grant
- Patent Title: Compact humidity and pressure sensor with temperature control
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Application No.: US17195027Application Date: 2021-03-08
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Publication No.: US11761936B2Publication Date: 2023-09-19
- Inventor: Vivek Saraf , Vishnu Srinivasan
- Applicant: pSemi Corporation
- Applicant Address: US CA San Diego
- Assignee: pSemi Corporation
- Current Assignee: pSemi Corporation
- Current Assignee Address: US CA San Diego
- Agency: JAQUEZ LAND GREENHAUS & McFARLAND LLP
- Agent John Land, Esq.
- Main IPC: G01N27/22
- IPC: G01N27/22 ; G01L19/04 ; G01N33/00 ; G01K7/20 ; G01L19/00 ; H01L23/34

Abstract:
Novel integrated circuit environmental and temperature sensors in combination with measurement circuitry fully integrated as part of an ASIC die, which may be co-packaged with a pressure sensor integrated circuit to create a compact yet sensitive environment monitoring product. Embodiments may include one or more integrated local heating elements and control circuitry that are power supply independent, make efficient use of battery power, include an accurate in-built temperature detection capability, and provide digital close-loop control of the heating elements.
Public/Granted literature
- US20210278385A1 Compact Humidity and Pressure Sensor with Temperature Control Public/Granted day:2021-09-09
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