Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17447464Application Date: 2021-09-13
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Publication No.: US11769554B2Publication Date: 2023-09-26
- Inventor: Kyosuke Sano , Kazutaka Ikegami , Takashi Maeda , Rieko Funatsuki
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 21045261 2021.03.18
- Main IPC: G11C11/34
- IPC: G11C11/34 ; G11C16/26 ; G11C16/30 ; G11C16/04 ; H10B41/10 ; H10B41/27 ; H10B43/10 ; H10B43/27

Abstract:
A semiconductor memory device of embodiments includes: a substrate; a memory pillar; first to sixth conductive layers provided above the substrate; first to sixth memory cells formed between the first to sixth conductive layers and the memory pillar, respectively; and a control circuit. The control circuit applies a first voltage to the first, second, a sixth conductive layer and applies a second voltage to the third, fifth conductive layer, then applies a third voltage to the first conductive layer, applies a fourth voltage to the sixth conductive layer, and applies a fifth voltage to the second conductive layer, and then applies a sixth voltage to the first conductive layer, applies a seventh voltage to the sixth conductive layer, and applies an eighth voltage lower than the fifth voltage to the second conductive layer.
Public/Granted literature
- US20220301636A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-09-22
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