- 专利标题： Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
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申请号： US17728820申请日： 2022-04-25
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公开(公告)号： US11769683B2公开(公告)日： 2023-09-26
- 发明人: Wendell Glenn Boyd, Jr. , Vijay D. Parkhe , Teng-Fang Kuo , Zhenwen Ding
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Lowenstein Sandler LLP
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/687 ; C03C17/00 ; G03F7/00 ; H02N13/00
摘要：
A coated chamber component comprises a body and a protective ceramic coating deposited over a surface of the body, the protective ceramic coating being amorphous and comprising about 8-20% by weight yttrium, about 20-32% by weight aluminum, and about 60-70% by weight oxygen.
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