Invention Grant
- Patent Title: Hollow-core photonic crystal fiber based optical component for broadband radiation generation
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Application No.: US17077756Application Date: 2020-10-22
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Publication No.: US11774671B2Publication Date: 2023-10-03
- Inventor: Patrick Sebastian Uebel , Peter Maximilian Götz , Sebastian Thomas Bauerschmidt , Coen Hubertus Matheus Baltis , Janneke Ravensbergen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 204985 2019.10.24 EP 217381 2019.12.18
- Main IPC: G02B6/02
- IPC: G02B6/02 ; C03B37/15 ; F21V8/00 ; G03F7/00 ; G03F9/00

Abstract:
Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
Public/Granted literature
- US20210124112A1 HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED OPTICAL COMPONENT FOR BROADBAND RADIATION GENERATION Public/Granted day:2021-04-29
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