Invention Grant
- Patent Title: Edge couplers including a rounded region adjacent to an opening in the interconnect structure
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Application No.: US17313472Application Date: 2021-05-06
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Publication No.: US11774686B2Publication Date: 2023-10-03
- Inventor: Brett Cucci , Yusheng Bian , Abdelsalam Aboketaf , Edward Kiewra , Robert K. Leidy
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: G02B6/42
- IPC: G02B6/42

Abstract:
Structures for an edge coupler of a photonics chip and methods of forming an edge coupler for a photonics chip. The structure includes a waveguide core on a dielectric layer, as well as an interconnect structure including a interlayer dielectric layer positioned over the dielectric layer and an opening penetrating through the interlayer dielectric layer to the waveguide core. A region of the interlayer dielectric layer is positioned to overlap with a portion of the waveguide core. The region of the interlayer dielectric layer has a surface that is rounded with a curvature.
Public/Granted literature
- US20220357530A1 EDGE COUPLERS INCLUDING A ROUNDED REGION ADJACENT TO AN OPENING IN THE INTERCONNECT STRUCTURE Public/Granted day:2022-11-10
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