公开(公告)号：US20220357530A1

公开(公告)日：2022-11-10

申请号：US17313472

申请日：2021-05-06

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Brett Cucci ,  Yusheng Bian ,  Abdelsalam Aboketaf ,  Edward Kiewra ,  Robert K. Leidy

IPC: G02B6/42

Abstract: Structures for an edge coupler of a photonics chip and methods of forming an edge coupler for a photonics chip. The structure includes a waveguide core on a dielectric layer, as well as an interconnect structure including a interlayer dielectric layer positioned over the dielectric layer and an opening penetrating through the interlayer dielectric layer to the waveguide core. A region of the interlayer dielectric layer is positioned to overlap with a portion of the waveguide core. The region of the interlayer dielectric layer has a surface that is rounded with a curvature.

公开(公告)号：US20220115546A1

公开(公告)日：2022-04-14

申请号：US17065839

申请日：2020-10-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Abdelsalam Aboketaf ,  Yusheng Bian

IPC: H01L31/0232 ,  H01L31/102 ,  H01L31/18

Abstract: Structures for a photodetector and methods of fabricating a structure for a photodetector. A photodetector includes a photodetector pad coupled to a waveguide core and a light-absorbing layer coupled to the photodetector pad. The light-absorbing layer has a body, a first taper that projects laterally from the body toward the waveguide core, and a second taper that projects laterally from the body toward the waveguide core. The photodetector pad includes a tapered section that is laterally positioned between the first taper and the second taper of the light-absorbing layer.

公开(公告)号：US12272758B2

公开(公告)日：2025-04-08

申请号：US17241525

申请日：2021-04-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Asif J. Chowdhury ,  Yusheng Bian ,  Abdelsalam Aboketaf ,  Andreas D. Stricker

IPC: H01L31/0232 ,  G02B6/24 ,  G02B6/12

Abstract: Structures for a photodetector or light absorber and methods of forming a structure for a photodetector or light absorber. The structure includes a pad, a waveguide core adjoined to the pad, and a light-absorbing layer on the pad. The waveguide core includes a first longitudinal axis, and the light-absorbing layer includes a second longitudinal axis and an end surface intersected by the second longitudinal axis. The end surface of the light-absorbing layer is positioned adjacent to the waveguide core. The first longitudinal axis of the first waveguide core is inclined relative to the second longitudinal axis of the light-absorbing layer and/or the end surface slanted relative to the second longitudinal axis.

公开(公告)号：US11927801B2

公开(公告)日：2024-03-12

申请号：US17880006

申请日：2022-08-03

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Abdelsalam Aboketaf

IPC: G02B6/126 ,  G02B6/12 ,  G02B6/132

CPC classification number: G02B6/126 ,  G02B6/12002 ,  G02B6/132 ,  G02B2006/1215

Abstract: Structures for a waveguide core and methods of forming such structures. The structure comprises a stacked waveguide core including a first waveguide core and a second waveguide core stacked with the first waveguide core, and a layer adjacent to the stacked waveguide core. The layer comprises a material having a refractive index that is variable in response to a stimulus.

公开(公告)号：US20240045142A1

公开(公告)日：2024-02-08

申请号：US17880006

申请日：2022-08-03

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Abdelsalam Aboketaf

IPC: G02B6/126 ,  G02B6/132 ,  G02B6/12

CPC classification number: G02B6/126 ,  G02B6/132 ,  G02B6/12002 ,  G02B2006/1215

Abstract: Structures for a waveguide core and methods of forming such structures. The structure comprises a stacked waveguide core including a first waveguide core and a second waveguide core stacked with the first waveguide core, and a layer adjacent to the stacked waveguide core. The layer comprises a material having a refractive index that is variable in response to a stimulus.

公开(公告)号：US20220252910A1

公开(公告)日：2022-08-11

申请号：US17170237

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michal Rakowski ,  Abdelsalam Aboketaf ,  Kevin K. Dezfulian ,  Massimo Sorbara

IPC: G02F1/025 ,  G02F1/015

Abstract: Structures for an optical power modulator and methods of fabricating a structure for an optical power modulator. A first waveguide core includes first and second sections. A second waveguide core includes a first section laterally adjacent to the first section of the first waveguide core and a second section laterally adjacent to the second section of the first waveguide core. An interconnect structure is formed over the first waveguide core and the second waveguide core. The interconnect structure includes first and second transmission lines. The first transmission line is physically connected within the interconnect structure to the first section of the first waveguide core. The second transmission line includes a first section physically connected within the interconnect structure to the second section of the first waveguide core and a second section adjacent to the first transmission line.

公开(公告)号：US20240210621A1

公开(公告)日：2024-06-27

申请号：US18597173

申请日：2024-03-06

Applicant: GlobalFoundries U.S. Inc.

Inventor： Brett T. Cucci ,  Yusheng Bian ,  Abdelsalam Aboketaf ,  Edward W. Kiewra

IPC: G02B6/122 ,  G02B6/12 ,  G02B6/125 ,  G02B6/132

CPC classification number: G02B6/1228 ,  G02B6/1223 ,  G02B6/125 ,  G02B6/132 ,  G02B2006/12061 ,  G02B2006/12147 ,  G02B6/1225

Abstract: Disclosed are embodiments of a photonic integrated circuit (PIC) structure with a waveguide core having tapered sidewall liner(s) (e.g., symmetric tapered sidewall liners on opposing sides of a waveguide core, asymmetric tapered sidewall liners on opposing sides of a waveguide core, or a tapered sidewall liner on one side of a waveguide core). In some embodiments, the tapered sidewall liner(s) and waveguide core have different refractive indices. In an exemplary embodiment, the waveguide core is a first material (e.g., silicon) and the tapered sidewall liner(s) is/are a second material (e.g., silicon nitride) with a smaller refractive index than the first material. In another exemplary embodiment, the waveguide core is a first compound and the tapered sidewall liner(s) is/are a second compound with the same elements (e.g., silicon and nitrogen) as the first compound but with a smaller refractive index. Also disclosed are method embodiments for forming such a PIC structure.

公开(公告)号：US11630335B2

公开(公告)日：2023-04-18

申请号：US17170237

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michal Rakowski ,  Abdelsalam Aboketaf ,  Kevin K. Dezfulian ,  Massimo Sorbara

IPC: G02F1/025 ,  G02F1/225

Abstract: Structures for an optical power modulator and methods of fabricating a structure for an optical power modulator. A first waveguide core includes first and second sections. A second waveguide core includes a first section laterally adjacent to the first section of the first waveguide core and a second section laterally adjacent to the second section of the first waveguide core. An interconnect structure is formed over the first waveguide core and the second waveguide core. The interconnect structure includes first and second transmission lines. The first transmission line is physically connected within the interconnect structure to the first section of the first waveguide core. The second transmission line includes a first section physically connected within the interconnect structure to the second section of the first waveguide core and a second section adjacent to the first transmission line.

公开(公告)号：US11588062B2

公开(公告)日：2023-02-21

申请号：US17065839

申请日：2020-10-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Abdelsalam Aboketaf ,  Yusheng Bian

IPC: H01L31/0352 ,  H01L31/0232 ,  H01L31/18 ,  H01L31/102

Abstract: Structures for a photodetector and methods of fabricating a structure for a photodetector. A photodetector includes a photodetector pad coupled to a waveguide core and a light-absorbing layer coupled to the photodetector pad. The light-absorbing layer has a body, a first taper that projects laterally from the body toward the waveguide core, and a second taper that projects laterally from the body toward the waveguide core. The photodetector pad includes a tapered section that is laterally positioned between the first taper and the second taper of the light-absorbing layer.

公开(公告)号：US20220350079A1

公开(公告)日：2022-11-03

申请号：US17306334

申请日：2021-05-03

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Abdelsalam Aboketaf ,  Yusheng Bian

IPC: G02B6/122 ,  G02B6/125 ,  G02B6/13

Abstract: Structures for a photodetector or terminator and methods of fabricating a structure for a photodetector or terminator. The structure includes a waveguide core having a longitudinal axis, a pad connected to the waveguide core, and a light-absorbing layer on the pad adjacent to the waveguide core. The light-absorbing layer includes an annular portion, a first taper, and a second taper laterally spaced from the first taper. The first taper and the second taper are positioned adjacent to the waveguide core.