- Patent Title: Supercontinuum radiation source and associated metrology devices
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Application No.: US17307217Application Date: 2021-05-04
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Publication No.: US11774828B2Publication Date: 2023-10-03
- Inventor: Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 175307 2020.05.19
- Main IPC: G02F1/35
- IPC: G02F1/35 ; H01S3/00 ; H01S3/067 ; G03F9/00

Abstract:
A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
Public/Granted literature
- US20210364885A1 SUPERCONTINUUM RADIATION SOURCE AND ASSOCIATED METROLOGY DEVICES Public/Granted day:2021-11-25
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