Invention Grant
- Patent Title: Method of fabricating a vertical semiconductor device
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Application No.: US17702967Application Date: 2022-03-24
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Publication No.: US11778825B2Publication Date: 2023-10-03
- Inventor: Bongyong Lee , Taehun Kim , Minkyung Bae , Myunghun Woo , Doohee Hwang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR 20190068800 2019.06.11
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B41/27 ; H10B41/35 ; H10B41/41 ; H10B43/35 ; H10B43/40

Abstract:
A vertical semiconductor layer includes a common source semiconductor layer on a substrate, a support layer on the common source semiconductor layer, gates and interlayer insulating layers alternately stacked on the support layer, a channel pattern extending in a first direction perpendicular to an upper surface of the substrate while penetrating the gates and the support layer, a sidewall of the support layer facing the channel pattern being offset relative to sidewalls of the gates facing the channel pattern, and an information storage layer extending between the gates and the channel pattern, the information storage layer extending at least to the sidewall of the support layer facing the channel pattern.
Public/Granted literature
- US20220216233A1 METHOD OF FABRICATING A VERTICAL SEMICONDUCTOR DEVICE Public/Granted day:2022-07-07
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