Invention Grant
- Patent Title: Selective encapsulation for metal electrodes of embedded memory devices
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Application No.: US16286995Application Date: 2019-02-27
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Publication No.: US11778929B2Publication Date: 2023-10-03
- Inventor: Ashim Dutta , Ekmini Anuja De Silva , Jennifer Church
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Thomas S. Grzesik
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10N50/01 ; H10N50/80 ; H10B61/00 ; H10B63/00 ; H10N70/20

Abstract:
A semiconductor device structure and a method for fabricating the same. The semiconductor device structure includes an embedded memory device and an electrode in contact with a top surface of the memory embedded device. A metal encapsulation layer is in contact with a top surface of the electrode and a portion of sidewalls of the electrode. The metal encapsulation layer comprises one or more materials that are chemical etch resistant and are conductive when oxidized. The method includes forming an insulating layer over a memory device and an electrode in contact with the memory device. Portions of the insulating layer are etched. The etching exposes a top surface and a portion of sidewalls of the electrode. A metal encapsulation layer is formed over and in contact with the top surface and the portion of sidewalls of the electrode.
Public/Granted literature
- US20200274066A1 SELECTIVE ENCAPSULATION FOR METAL ELECTRODES OF EMBEDDED MEMORY DEVICES Public/Granted day:2020-08-27
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