- 专利标题: Mercury cadmium telluride-black phosphorous van der waals heterojunction infrared polarization detector and preparation method thereof
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申请号: US17585249申请日: 2022-01-26
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公开(公告)号: US11784265B2公开(公告)日: 2023-10-10
- 发明人: Xudong Wang , Hanxue Jiao , Yan Chen , Jianlu Wang , Xiangjian Meng , Hong Shen , Tie Lin , Junhao Chu
- 申请人: Shanghai Institute of Technical Physics Chinese Academy of Sciences
- 申请人地址: CN Shanghai
- 专利权人: Shanghai Institute of Technical Physics Chinese Academy of Sciences
- 当前专利权人: Shanghai Institute of Technical Physics Chinese Academy of Sciences
- 当前专利权人地址: CN Shanghai
- 代理机构: Gable Gotwals
- 代理商 James F. Lea, III
- 优先权: CN 2110107189.4 2021.01.27
- 主分类号: H01L31/0336
- IPC分类号: H01L31/0336 ; H01L31/0224 ; H01L31/0296 ; H01L31/109 ; H01L31/18
摘要:
Disclosed are a mercury cadmium telluride-black phosphorus van der Waals heterojunction infrared polarization detector and a preparation method thereof. The structure of the detector from bottom to top comprises a substrate, a mercury cadmium telluride material, an insulating layer, a two-dimensional semiconductor black phosphorus, and metal electrodes. First, growing the mercury cadmium telluride material on the substrate, removing part of the mercury cadmium telluride by ultraviolet lithography and argon ion etching, filling with aluminum oxide as the insulating layer using an electron beam evaporation method, transferring the two-dimensional semiconductor material black phosphorus at the junction of mercury cadmium telluride and an insulating layer assisted by a polypropylene carbonate film, and preparing the metal source-drain electrodes by electron beam lithography technology combined with the lift-off process to form the mercury cadmium telluride-black phosphorus van der Waals heterojunction infrared polarization detector.
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