- 专利标题: Packaging method and package structure for filter chip
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申请号: US16968738申请日: 2019-12-11
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公开(公告)号: US11784625B2公开(公告)日: 2023-10-10
- 发明人: Yingqiang Yan , Chuan Hu , Zhitao Chen
- 申请人: GUANGDONG INSTITUTE OF SEMICONDUCTOR INDUSTRIAL TECHNOLOGY
- 申请人地址: CN Guangdong
- 专利权人: GUANGDONG INSTITUTE OF SEMICONDUCTOR INDUSTRIAL TECHNOLOGY
- 当前专利权人: GUANGDONG INSTITUTE OF SEMICONDUCTOR INDUSTRIAL TECHNOLOGY
- 当前专利权人地址: CN Guangdong
- 代理机构: Thompson Hine LLP
- 国际申请: PCT/CN2019/124590 2019.12.11
- 国际公布: WO2021/114140A 2021.06.17
- 进入国家日期: 2020-08-10
- 主分类号: H03H9/05
- IPC分类号: H03H9/05 ; H03H9/25 ; H01L23/66 ; H03H3/08
摘要:
A packaging method and package structure for a filter chip. The packaging method includes providing a circuit substrate, covering a first surface of the circuit substrate and/or filter chip with adhesive material and forming recessed cavities or closed cavities in the adhesive material. The method further includes adhering the filter chip to the first surface of circuit substrate via the adhesive material, such that surface acoustic wave transmitting regions of the filter chip correspond to the recessed cavities or closed cavities in the adhesive material to form a gap therebetween, and encapsulating the filter chip with encapsulating material. The method further includes forming interconnecting holes extending from a second surface of the circuit substrate to pins of the filter chip, filling the interconnecting holes with conductive material, so that the conductive material is in electrical contact with a chip pin bump or pad metal of the filter chip, and forming external pin pads on the second surface.
公开/授权文献
- US20210184649A1 PACKAGING METHOD AND PACKAGE STRUCTURE FOR FILTER CHIP 公开/授权日:2021-06-17
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