- 专利标题: Automated tomography field ion microscope
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申请号: US17435247申请日: 2020-02-20
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公开(公告)号: US11791129B2公开(公告)日: 2023-10-17
- 发明人: François Vurpillot , Rodrigue Larde , Benjamin Klaes , Gérald Da Costa
- 申请人: Centre National De La Recherche Scientifique , Institut National Des Sciences Appliquees De Rouen (INSA) , Universite De Rouen Normandie
- 申请人地址: FR Paris
- 专利权人: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE ROUEN (INSA),UNIVERSITE DE ROUEN NORMANDIE
- 当前专利权人: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE ROUEN (INSA),UNIVERSITE DE ROUEN NORMANDIE
- 当前专利权人地址: FR Paris; FR Saint Etienne du Rouvray; FR Mont Saint Aignan
- 代理机构: BakerHostetler
- 优先权: FR 02139 2019.03.01
- 国际申请: PCT/EP2020/054508 2020.02.20
- 国际公布: WO2020/178038A 2020.09.10
- 进入国家日期: 2021-08-31
- 主分类号: H01J37/26
- IPC分类号: H01J37/26 ; H01J37/285
摘要:
A method for imaging a material to atomic scale by means of a field-ion microscope having a vacuum chamber configured to accommodate the material prepared in the form of a tip and an imaging gas, and an ion detector is provided. The method includes application of a DC electrical potential (VDC) and of a pulsed electrical potential, of which the maximum pulse value is denoted Vimp, so that the tip erodes for a potential value equal to VDC+Vimp; acquisition, by the detector between at least two pulses of the pulsed potential, of series of at least two ion images of the impacts of the ions repelled by the tip onto the detector; and calculation of a quantity characteristic of a trend of the erosion of the tip based on the series of ion images acquired and the adjustment, between each series of images, of the values of VDC and of Vimp such that the quantity characteristic of the trend and the ratio VDC/Vimp remain constant.
公开/授权文献
- US20220139666A1 AUTOMATED TOMOGRAPHY FIELD ION MICROSCOPE 公开/授权日:2022-05-05
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